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Ӧó
ϢԴ ϴڣ2018-06-13 ʣ1044
Ӧó

塢Һ弰д䴫ٶȲͬ⣬Ҳͷ󣬲ڴ˥ ڿ˥Ͽ죬Һ弰д˥СԶóԣɸֳϲͬĵ·Ƴɸֳװá

Ӧֻͣ͸ңԶšӽصȣʽڲࡢҺλλڲ̽ˡȡ

Ӧ



óĺȣвȸߡ򵥡Զŵ㡣ز˷Ĺԭͼʾ̽ͷ뱻ӴһƵʵźżѹʽ̽ͷʹ֮ظij塣屻⹤һʱͬһ̽ͷա



̽ͷ䳬壬ﱻʱһֻ̽ͷաӷ䳬嵽ճʱtٳԿ٣340m/sdzڱ·̣2͵õ롣



λ

ڸڵҺ߶ȼڵλóΪҺλϡϵĸ߶ȻλóΪλͳΪλ



λǸݳֽʵķֽϵķԶġ

ݷͽջĹܣλɷΪ˫֡ڷͽճʱʹһ˫ԳķͽոһΡ

ɷˮУóҺдڳҺ˥ȽСԼʹijȽСҲԴҲ԰װҺϷóڿдַʽڰװάޣڿе˥Ƚӷ䳬忪ʼջյ䲨ΪֹʱΪ֪ͿֽλãַʵֶλIJ

λоȸߡʹװ㡢ܱӰ졢ʵΣճķǽӴŵ㡣ȱǣҺݻҺ淢нϴһʹ£IJΪʿ0.1% ΧΪ10-2-104m

óдʱھֹеĴٶȲͬص㣬Ӷٺ



ͼvΪƽ٣cΪھֹеĴٶȣqΪļн( С 90),AB ΪLΪ֮

ַͨʱλƵʲ

в谭ص㣬ʵ˷ǽӴɲܶ࣬Ƿǵ塢ȵ塢״壬ֻҪܴ䳬嶼ԽвƿˮҵˮũҵˮȽвˮũҵȡٵIJ



̽

̽ڹҵбӦã͸̽˺ͷ䷨̽ˡ

͸̽ˣǸݳ͸ı仯жϹڲ



÷ֱڱ⹤棬һ䳬һճ䳬Ҳźš

⹤ȱʱյijʾDZָʾֵ󣻵ȱʱ䣬˽յijСʾDZָʾֵС仯ɼڲȱݡ

䷨̽ˣǸݳڹзIJͬ̽⹤ڲǷȱݡַΪһ巴䷨Ͷ巴䷨֡



ʱ̽ͷڱ⹤ϣڹƶм⡣ɸƵ巢(T) ڳ̽ͷϣ̽ͷijһٶ򹤼ڲУһֳȱʱȱFһֳҲBȱF͵B̽ͷպΪ壬뷢Tһ𾭷Ŵʾӫʾ

巴䷨ԶεײΪݶ̽˵ķ̽ͷijɱ⹤ײس̽ͷʱһֳ̽ͷգʣ²ۻعײ䣬ֱȫ˥Ϊֹ



̽ĿǰӦʮֹ㷺ֶ̽Ρȿɼϱȱݣֿɼڲȱݣx̽ﲻȡ



ϴ

źҺʱҺһĸѹҺӣҺзӿ϶Ӵγ΢СݣǿźҺʱҺһѹҺѹСҺγɵ΢Сݱѹ顣о֤ҺʱҺÿݵѻij൱˲ٶȵĸº͸ߴǧѹѹ󱻳֮ΪջáϴҺijﵽϴͳˢáϴڰ뵼塢еҽҵ



˳һЩӦùܣڸҵеӦó

ڻеӦ

ż˹ܵķչƶıϼѾȡ˷˶оɹƶ˵Ѱ·ҪѾ֮ǰ򵥵ĹʵɿԡͨԡЧ˶ؼ˸ߵҪ



óϻС

ʵֻиҪ󣺱ϡ ʵֱ뵼ıҪǻ֪ ҪͨȡΧϢϰijߴ硢״λõϢ˴ƶ˱ʮҪá

ʹõĴҪгӾ⴫⴫ȡ



ϼԭ

ԭǣټ⵽ijʱͬʱټľ롣ڳڿеٶʪйأڱȽϾȷIJУʪȵı仯ؿǽȥ

һþ϶̣ͨЧ̽붼510֮䣬ǻһС̽äһڼʮסڳijɱͣʵַ򵥣죬ƶгõĴ

ɻ߿ս̽

ôԷɻĸ߿սзֱ̽⼼ôо»ᣨNRCϿ׼ת빤ҵӦá



̽⣬ڷɻ̽

ƲеҺ̬ˮķɻѾ˺սʮ꣬оƲк״޷ֵıΣգ߶ȼ۵ıӰ췢ٹܡNRCʾĿǰûпɿĴܹṩԻھʾװÿֲһȱʧ

ֳƬʽװСᱡҵ͹óʽͬʱΪͨԽṹ淢ɱӶӳһĻݡ

NRCʾֳװò谲װڱ⻷СڷɻһDZ¶棬˴Ϊж͸˵ķաԱ֪Щλ׽ͿСⷶΧѴװͨһĺλʱͿ̽Ƿˡ

ܹʵķ̽⵽ۣҴ㹻жֻ۵س̶ȣЧǿȡ̽ǷѾ㹻ڳߴ硢͹ĶСNRCΪ԰װ̽ɵУͿṩ㸲ǷΧϸݡ

IJܲеӦ

ĵ״Ӧ˳ϵͳĿǰֳõij෽һǻڵƬǶʽ豸ijϵͳһǻCPLD(Complex Programmable Logic Device)ijϵͳ



ԭóڿеĴٶΪ֪ڷϰﷴʱ䣬ݷͽյʱ㵽ϰʵʾ롣ȣijһ䳬ڷʱ̵ͬʱʼʱڿд;ϰյ䲨ֹͣʱڿеĴٶΪC=340m/sݼʱ¼ʱT룬ͿԼϰľLL= CT /2 νʱ෨

ڳҲһ C ¶йأ1г˼ֲͬ¶µ١ʹʱ¶ȱ仯ΪǻġྫҪܸߣӦͨ¶ȲķУ



¶ȵĹϵ

ڳڶ䡢Ժáǿ׿ơ뱻岻ҪֱӽӴŵ㣬Ϊѡ

ָֻ֤

ͨ΢ɻϵͳMEMSĴ߱ͽĶάУ䵽ָijķȡָơָմˮ״̬Ҳ׼ȷȡͼӡָƵֽŵȽ֤ʱҲʶܽоָ漸٦mҵɨ衣

ָƴֵijշ4.73mm3.25mmMEMSоƬγɣصڶȡCMOS ICϡշ˱PDMSĤ11056ѹԪͺͽճѹԪ43̵ݼ58mĺáΪ׼ȷȡͲȵļΪ٦mָƣƵó14MHzǿɷֹɢҲPDMSƤ˥Ƶֵ

ȡָʱPDMSָı߽硢ԼָƤƤ֯ı߽ij䡣ָУPDMSӴIJ岿ֺӴIJȲڷϴͬ÷䲨ʶָơңñƤƤ֯ı߽ķ䲨ʶӡαָƵֽŵȡ



γɳշеѹԪͨ²΢ǻĹ象Ĥѹ϶γɵģʩӵѹʹ䷢񶯡ȡʱԶȡ񶯶ĵѹ仯Ϊ˼СȡʱڸԪԱû΢ǻ޷ճԪԪյijźΪò·

ҽѧϵӦ

ҽѧϵӦҪϼѾΪٴҽѧвȱٵϷϵŵǣܼʹࡢ𺦡㡢ϵ׼ȷʸߵȡƹףܵҽߺͻߵĻӭϿԻڲͬҽѧԭдԵһνAͷóķ䡣֯д迹ͬĽʽǣڸýͲÿһʱʾĻʾ迹ֵҲ˻ĸߵ͡

ʵУDzѷֳӦӰſƼˮƽĸٷչʹ÷ΧҲ㷺෢չʷϣӦ޴ڣֻҪ󵽵ĵطһš

Ųƽ̨ Ȩ

ַׯ161¥6 ʱࣺ100037